EUV Solutions
EUV Metrology
EUV Solutions
EUV Metrology
Actinic EUV source metrology solutions
We provide a broad range of metrology solutions for actinic characterization of EUV sources. Our EUV pulse energy monitor E-MON provides absolute measurements of source power. Emission spectra can be characterized using our compact E-SPEC spectrograph, and a broad range of imaging solutions is available to characterize actinic emission profiles.
E-MON
Inband energy/power
The EUV pulse energy monitor E-MON is designed for the absolute measurement of the inband power of EUV-sources and can be delivered PTB calibrated. The energy monitor can be easily integrated into existing installations using standard vacuum interfaces. Our digital signal registration unit DSRU and software allows automated recording of dose data and integration into machine control systems.
E-SPEC
Emission spectra
The EUV spectrometer E-SPEC measures the EUV spectrum emitted from a source with spectral resolution of > 500 (Pixel: >2000) with a back-illuminated CCD camera. Spectral calibration is supplied based on NIST lines.
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