The EUV Pellicle Reflection and Transmission qualification Tool (EUV-PRTT) has been developed together with ASML to qualify EUV pellicles and is used supply chain production quality verification. It measures the properties with RI’s proprietary AIMER™ concept as a full spatially resolved map with intrinsic 13.5 µm squared pixel resolution. For transmission of typically around > 90 % the tool reproducibility and accuracy is better than 0.1%​The tool can measure reflectivity's below 0.01% and with reproducibility's and sensitives well below 0.001%. As used in the industrial process for production or in fab use, the EUV-PRTT meets the cleanliness requirements as defined for the ASML lithography systems.