EUV Solutions

EUV / XUV Solutions

RI Research Instruments provides advanced solutions utilizing XUV and EUV photons for applications in nanoscopy, nanolytics, and EUV lithography infrastructure. We deliver stand-alone tools to leading semiconductor manufacturers and research institutions, supporting a broad spectrum of activities—from soft X-ray imaging of biological tissues to cutting-edge EUV applications. Our portfolio also includes systems for solar research, photochemistry, and customized DPP and LPP sources for XUV, EUV, and soft X-ray generation. Our systems can be designed to handle 12 inch masks and provide valuable information for the development of next technology nodes.

View of a clean room at RI with big metal cabinets and two people in blue and white clean-room attire

Portfolio

Product Line-up

EUV / XUV portfolio

Our building blocks, solutions and tools include:

Stand-alone DPP and LPP sources for XUV, EUV and soft X-rays with application-tailored interfaces
Debris mitigation systems
Spectral filtering systems
Available in grades for R&D and industrial use
Metrology tools for source characterization

EUV lithography

Actinic EUV tools for the EUV-lithography supply chain such as:

EUV-PRTT: EUV Pellicle reflection and transmission measurement tool
EUV-MBR: EUV Mask Blank Reflectometer for spectral reflectometry
EUV-AIMER: full reticle inband EUV mapping reflectometry
EUV-TEUVL and EUV-LET: Actinic EUV resist flush or interference lithography exposures for tests on sensitivity and resolution

teaser image of the EUV-LET in a laboratory

Customer specific developments

At RI, we provide more than just off-the-shelf solutions. A core part of our business is to develop, design, manufacture, test and deliver systems and components tailored to the needs of our customers. With an established network of experienced partners, our developments are based on well-proven building blocks and components, backed by our experience in fast realization from drafted demands to dedicated tool operation at customers’ site.

Our research and application laboratories support such developments by enabling proof of concepts or tests of critical components with available EUV-sources, components and test installations.

Contact our team!